Shuttleline® Platform PECVD Supports Advanced Research Applications

April 1, 2026

Shuttleline® Platform PECVD Supports Advanced Research Applications

Plasma-Therm continues to see strong momentum for the Shuttleline® platform, supporting advanced research environments through flexible, high-performance PECVD processing.

The Shuttleline platform is designed for flexibility across varying substrate sizes, making it well suited for dynamic R&D environments. Its configuration enables consistent process performance and high-quality thin-film deposition.

With PlasmaBox™ PECVD integration, the Shuttleline platform supports applications across semiconductor research, advanced materials, and emerging technologies.

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Learn more about CHA Industries Products and explore capabilities across the Plasma-Therm portfolio.

Corial Shuttleline platform PECVD system for thin-film deposition
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