ABOUT THE COMPANY
Pioneering innovative solutions that empower industries through advanced technology and expert-driven strategies since 1954.

CHA Industries is a leader in the design, production, and distribution of vacuum deposition systems and precision coating equipment. All systems and components are carefully designed and manufactured at our central location, which ensures reliable support, quality, and performance that our customers have come to expect.
In addition to developing the Mark 50, an industry workhorse, we also pioneered planetary filtering. Building on this foundation of expertise, we continue to offer a range of advanced filtering solutions, including planetary, lift-off, and flip filtering, for a variety of applications.
Furthermore, we’re excited to announce that CHA Industries has been acquired by Plasma-Therm. This strategic partnership significantly expands our capabilities, providing even more advanced solutions, increased resources, and access to a broader global network. As a result, both our existing and prospective clients will benefit from enhanced support and innovative products, allowing us to better meet your unique business needs and help you succeed in today’s fast-paced market.
TIMELINE
– 1974
Plasma-Therm founded

– 1977
Plasma etch system introduced
– 1979
PECVD system
– 1984
World’s first single-wafer production metal etcher in-line system
– 1992
High volume GaAs via etching for HBT production
– 1995
Versalock®: cluster tool

– 1996
High Density Plasma Etch technology
– 2000
Acquisition by Swiss holding company Unaxis (later named Oerlikon)

– 2005
VERSALINE®: plasma system

– 2006
– Mask Etcher® V: for production below 32 nm

– 2009
Management buyout re-established Plasma-Therm

– 2011
Plasma-Therm acquires Advanced Vacuum Europe

– 2013
Singulator® 300mm system

– 2016
Acquired High Density Radical Flux technology from Nanoplas
– 2016
Acquired ion beam systems manufacturer Nano Etch Systems
– 2016
DISCO Corp. signs global distribution agreement for Plasma-Therm’s plasma dicing technology

– 2017
Plasma-Therm partners with memsstar to offer complete solutions for MEMS fabrication

– 2018
Acquired KOBUS products with F.A.S.T®-CVD (Fast Atomic Sequential Technology)
– 2018
Acquired OEM Group Dry Process Business

– 2020
Acquired specialty engineering company, JLS Designs Ltd

– 2020
Opened Plasma-Therm UK
Specialty Process Equipment Group
– 2020
Opened Plasma-Therm Singapore Process and Technical Support
– 2020
Acquired OEM Group Dry Process Business

Meet our executive team
ISO 9001:2015 Certified by NQA
CORPORATE SOCIAL RESPONSIBILITY
GENERAL TERMS
PURCHASING TERMS
Passion and Purpose
It’s a Team Effort
Designed for Maximum Performance
Because you deserve the best performance possible, we continually improve our plasma-based process systems to exceed your expectations.
Results Measured by Your Experience
We continuously evolve our plasma-based systems and solutions to match the changing needs of manufacturing and R&D environments. Today, the emerging markets for microelectronic technologies include 5G, power devices, sensors, photonics, renewable energy, AR/VR, data storage, analytics, and more. Our solutions work across the board to support the activation of these new technologies that are changing our lives. No matter which part of the ecosystem you work in, rest assured we can support your central manufacturing or R&D efforts. You can count on us to help you reach your process, yield, and capacity goals. Together, we’ll drive the progress of leading technologies that enhance the lives of people around the world.
