CHA Industries proudly presents the MARK 60 system, designed for Lift-Off Fixturing with advanced source isolation technology. Built for precision and reliability, the MARK 60 offers industry-leading features to enhance your semiconductor manufacturing processes.

Key Features of the MARK 60:

• Lift-Off Tooling Capacity: Supports 39-100 mm wafers and 22-150 mm wafers.

• Efficient Cryo Pumping: Equipped with an Edwards 500 cryo pump, with an optional water pump available.

• Source Isolation Technology: Features a drop-down slide-out source tray for easy access and enhanced process control.

• Robust Chamber Design: Constructed with an all stainless-steel, water-cooled chamber for maximum durability.

• High-Performance Valves: Includes a VAT high vacuum and source isolation gate valve for precise vacuum management.

• Extended Source-to-Substrate Distances: Offers adjustable distances up to 48 inches for greater flexibility.

• Advanced Control System: Integrated PL/PLC control with a user-friendly CHA-designed HMI for intuitive operation.

Commitment to Quality and Support

CHA Industries designs and manufactures all systems and components at our centralized facility, ensuring consistent quality, reliable performance, and prompt support for your operational needs.