Targeting R+D, Pilot Line Production and university requirements, the new Criterion system offers midrange sizing incorporating both load lock and source isolation options. The Criterion Systems feature a hinged, water-cooled front door and a new frame design. The new chamber design will accommodate many tooling configurations and a variety of deposition sources and combinations of sources. Control is achieved via a touch screen PC/PLC.

• Vacuum Chamber
  • Type: Water cooled stainless steel
  • Size: 23″ D x 20″ W x 26″ H
  • Volume: 190L or 6.6ft^3
  • Inlet flange: NW 80
  • Source distance: 18″
• Tooling Options
  • Lift-off dome capacity examples, 5 x 150mm/ 7 x 125mm/ 9x 100mm/19x 75mm
  • Planetary dome capacity examples: 9 x 150mm/12 x 125mm/ 18 x 100mm/ 36 x 75mm
• Pumping Options
  • Diffusion: 1550 liters/sec
  • Turbomolecular: 1450 liters/sec
  • Cryo: 1500 liters/sec
• Systems Control Options
  • Manual: Autotech sequencer
  • PLC: Siemens touch screen
• Vapor Source Options
  • Electron beam gun: 4 x 25cc /4 x 40cc / 6 x 15cc / 6 x 25cc
  • Resistance source
  • Swing source
  • Ion Beam Aided Deposition
• Power Requirement Options
  • Domestic: 120VAC/60Hz, 208VAC/60Hz
  • International: 220VAC/50Hz
• Pumping Options
  • Cryo
  • Turbo
  • Diffusion
• Ultimate Vacuum
  • System 10 -9 Torr
  • Chamber 10 -8 Torr