Spare Parts
Mark 40/50 Type Systems Miscellaneous Spare Parts
| ITEM | QTY | U/M | P/N | DESCRIPTION |
| 1 | kit | 5-V-40 | Complete O-ring kit. (Mark 40, D.P. System) | |
| 1 | kit | 5-VC-40 | Complete O-ring kit. (Mark 40, Cryo System) | |
| 1 | kit | 5-V-50 | Complete O-ring kit (Mark 50, D.P. System) | |
| 1 | kit | 5-VC-50 | Complete O-ring kit. (Mark 50, Cryo System) | |
| 1 | ea. | 6041 | Roughing port screen (for block valve) | |
| 1 | ea. | 83453 | Solenoid Valve – block valve, relay logic | |
| 1 | ea. | 83453-24VAC | Solenoid Valve – block valve, PC/PLC | |
| 1 | ea. | 6113M4B | Ball Check Valve | |
| 1 | ea. | B1GS4 | Toggle Valve | |
 | 1 | ea. | 8262B210LT | Solenoid Valve, LN2 |
 | 1 | ea. | 02X2 | LN2 Heater Cartridge |
| 2 | ea. | IG100N | Ion Gauge Tube, Nonex tubulation | |
| 2 | ea. | 275-071 | Convectron Gauge Tube | |
| 1 | ea. | DV-6M | Thermocouple Gauge Tube (Cryo pumped system) | |
 | 1 | ea. | P11031W3AX7657 | Pressure switch |
| 1 | ea. | P02900-1 | Vacuum Sensor Assy (replaces 5898 Snap Switch sensor) | |
| 7 | ea. | 312135T | Light/Lens assembly for Auto Tech IIC. (Include 1 of each of the the following engraved lenses: “Manual”, “Off”, “Roughing”, “Automatic”, “Standby”, “Hi-Vac”, & “Vent”.) | |
| 5 | box | 008010G10 | Quartz crystals, sensor head. (10/box) | |
| 4 | ea. | 6230-21 | O-ring, view port | |
 | 3 | ea. | 5738-6 | Pyrex view port (with o-rings) |
| 1 | ea. | 5890-11 | Mirror Array | |
| 2 | ea. | 6066 | Rear wire mirror hanger | |
| 1 | ea. | 6738-47-3 | Chamber door micro switch | |
| 1 | ea. | 5538-1&2 | 6 inch shutter blade set (1 pkt/res) | |
| 1 | ea. | 6687-4&5 | 8 inch shutter blade set (Temescal EB) | |
| 1 | ea. | 8933-1&2 | 8 inch shutter blade set. (CHA EB) | |
| 1 | ea. | 12839-1 | Flag Shutter Blade | |
| 1 | gal. | AW32 | Hydraulic Fluid, 1 Gallon | |
| 2 | btl. | DC704-500CC | Diffusion pump fluid, 500cc | |
| 1 | gal. | 1407K-1GAL | Mechanical pump fluid, 1 gallon | |
| 1 | ea. | 13X | Sieve material, 1 pint (for CHA sieve traps) | |
| 1 | kit | EF75-054HD-99 | Heavy Duty Offset Drive Assembly Rebuild Kit | |
 | 2 | ea. | 6262-32 | MK50 Door Gasket |
| 2 | ea. | 6262-25 | MK40 Door Gasket |
| 1 | ea. | 6515 | MK40/50 Valve body gasket | |
Mark 40/50 Type Systems Rebuild Kits
| ITEM | QTY | U/M | P/N | DESCRIPTION |
| 1 | kit | 6532-99 | Mark 40/50 Hi-Vac Valve Rebuild Kit consisting of the following: | |
| 2 | 2-385 | 16″ gate o-ring | ||
| 3 | 6227-19 | Actuator shaft seal | ||
| 1 | 6230-14 | Cylinder to shaft seal | ||
| 1 | 732CAV312 | “CAV” cup packing | ||
| 1 | 2500×3000 | Poly pack seal | ||
| 1 | 6514-6 | Actuator shaft bushing, Teflon | ||
| 1 | MAV-2C | Cartridge valve | ||
| 1 | D39 | Dowel Pin | ||
| 1 | kit | 5288-99 | Roughing and Foreline Block Valve Components consisting of the following: | |
| 2 | CB-28218 | Piston cup | ||
| 2 | 5288-4 | Gate | ||
| 2 | 5288-5 | Actuator Shaft | ||
| 2 | 4496-P1 | Plate, end actuator | ||
| 2 | N5000225H | Retaining ring | ||
| 2 | 6186 | Lock pin gate | ||
| 2 | 6230-4 | O-ring end plate | ||
| 4 | 6227-10 | O-Ring shaft | ||
| 6 | 6230-16 | O-ring Body | ||
| 2 | 6230-12 | O-ring Gate | ||
| 2 | 7100-3/8 | Stato seal |
Mark 40/50 Type Systems Fixturing
| ITEM | QTY | U/M | P/N | DESCRIPTION |
| Heavy Duty Offset Drive spare parts (EF75-054HD): | ||||
| 1 | ea. | VB20002500250 | Ball bearing | |
| 1 | ea. | VB20002625312 | Ball bearing | |
| 3 | ea. | VS200S | Retaining Ring | |
| 1 | ea. | VH262S | Retaining Ring | |
| 1 | ea. | VBDD375875281B | Ball bearing | |
| 1 | ea. | B98 | Needle bearing | |
| 1 | ea. | IR68 | Inner Race | |
| 1 | ea. | 6511-5 | Drive Shaft | |
| 3 | ea. | 6227-19 | O-ring | |
| 2 | ea. | 6227-8 | O-ring | |
| Lift-Off Dome: | ||||
| 4 | ea. | VBDD375875281F | Ball Bearing | |
| 8 | ea. | 5100-37H | Retaining Ring | |
| Offset Drive spare parts (EF75-054): | ||||
| 1 | ea. | 6511-5 | Drive Shaft | |
| 1 | ea. | B98 | Needle Bearing | |
| 1 | ea. | IR68 | Inner race | |
| 3 | ea. | 6227-19 | O-ring, drive shaft | |
| 2 | ea. | 6227-8 | O-ring, drive housing | |
| 2 | ea. | VBDD15622000281250 | Ball bearing, drive gear | |
| 1 | ea. | VBDD375875281B | Ball bearing, drive housing | |
| Planetary Domes: | ||||
| 6 | ea. | VBDD375875281F | Ball bearing, drive housing | |
| 3 | ea. | 6681-7 | Dome Hanger (031 model/size) | |
| 3 | ea. | 6344-9 | Dome hanger (041 model/size) | |
| 3 | ea. | 6509 | Dome hanger (051 model/size) | |
| 3 | ea. | 6709 | U-clip (1 each, per dome hanger arm) | |
| 100 | ea. | 8818 | Retaining clip (Back-loading Swivel Clip Style) | |
| 100 | ea. | C0210-022-0310S | Compression spring (Back-loading Swivel Clip Style) | |
| 100 | ea. | 5555-12H | Grip ring (Back-loading Swivel Clip Style) | |
| 100 | ea. | 5827 | CHA Coil spring clip. (Front Loading spring clip style)(For substrates 0 to .045 thick) | |
| 100 | ea. | 6359 | CHA Extended Coil Spring Clip. (Front Loading spring clip style) (For substrates .045 to .150 thick) | |
