Used Systems

  • CHA chamber and controls.

  • View of slide out source tray with dual electron beam guns.

  • System front view displaying slide down front door and automation control panel.

  • Internal chamber view depicting multiple ion beam sources and neutralizer.

  • System side view showing access to high vacuum pumping stack.

MK50 Web Roll Coater

  • Varian VHS-400 Diffusion Pump
  • Edwards E2M80 Mechanical Pump
  • 14" Max web width
  • 2 ea Temescal single pocket EB Guns
  • 2 ea SR15 Power Supplies
  • 1 ea IC6 Deposition Controller
  • 1 ea KRI EHL-400-3 Ion Source, Power Supply, Gas Control
  • 1 ea Inficon Guardian Deposition Controller, Sensor, 2 ea Optical Detector Modules and Optical Filters
  • 1 ea Pyrometer
  • 1 ea Camera for source viewing

Contact CHA for more information.

 

Solution

CHA Solution R+D/Pilot Line Production System currently configured for thermal evaporation using Knudsen type planetary. Available “as is” or can be configured to meet your application requirements.

Contact CHA for more information.

 

Bell Jar

CHA SE 600 Bell Jar Evaporation System for Production, R&D and University applications currently configured with multi-pocket electron beam source. This system is equipped with CHA’s Flip Fixturing designed for dual face deposition schemes. The system is available “as is” or can be configured to meet your application requirements.

Contact CHA for more information.