Parts and Components
Whether your needs are for new or remanufactured systems, sputtering or evaporation systems, or coater systems, you can rely on CHA Industries to deliver the highest levels of productivity and throughput.
Adjustable Angle, 3-Dome, and Flat Plate designs available for excellent uniformity.
Carousel model handles small substrates while the Suspended handles larger substrates.
For applications requiring coating of more than a single side or surface of substrates.
- Electron Beam Guns
CHA’s SmartSource raises PVD performance and operator convenience.
- Thermal Sources
Choose between Fixed Resistance, Swing and Outrigger sources for your specific needs.
- Source Combinations
Combines Swing Source and SmartSource for university, R&D and multilayer film processing.
- Wire Fed Sources
Designed for flash evaporation of alloys and deposition of pure metals.
- Resistance Power
Available with 2000 Watt and 5000 Watt outputs for single or dual thermal deposition sources.
- Heater Power
Provides up to 16kW of SCR controlled power for heat sources like quartz lamps.
- SR-Series Electron
Provides maximum, reliable power output ranging from 3kW to 15kW.
Ideal for wide range of current transmission for power supplies, heater power and sources.
Designed for instrument readout and easy installation.
Allow fluid passage through the body to protect against freezing and boil-off.
Available as a bank-off plug, for tubulation, or for optical transmission and measurements.
Provides rotary and/or linear motion within the vacuum chamber.
Call (510) 683-8554 or email CHA for more information.